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From Book 1:
Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms.
Topics include:
- Crystallography and the crystalline materials used in many semiconductor devices
- Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS
- Single crystal Si properties that conspire to make Si so important
- Optical properties of bulk 3D metals, insulators, and semiconductors
- Effects of electron and photon confinement in lower dimensional structures
- How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics
- Metamaterials and how they could make for perfect lenses, changing the photonic field forever
- Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior
- Electromechanical and optical analytical processes in miniaturized components and systems
The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.
Most helpful customer reviews
0 of 1 people found the following review helpful.
good
By Kwon, Jiseok
good!! very useful to me!!!
I want to recommend this product to my friends.
the color is very great apparently.
8 of 13 people found the following review helpful.
honey HE(Marc J. Madou) shrunk the world....
By Diego Radzinschi
Nanotechnology and MEMS are among the active research areas world and will continue to be so during the next decade and paving way to new generation of taking an insight into micro world making this work "Fundamentals of Microfabrication" an important stepping stone for the better future. Marc J. Madou is internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication. This book will functions hand book for beginners. This book helps you explore the world of micromachines and miniaturization. The Ten chapters cover in detail, topics explaining the methodogy of microfabrications including micromachining technologies available today. Comparision of traditional and non-traditional microfabrication tools for different applications. The book also provides discussion about quantum structures and reviews molecular engineering. Appendices offer valuable information in an easily accessible format. Hyperlinked documents are provided for futher exploring the world of micromachining and microfabrication.
1 of 2 people found the following review helpful.
Reference Resource
By B. T. Price
Comprehensive in-depth reference tool - this is how the book has been characterized by a university professor using it for his course instruction. I concur. Amazing amount of practical detail in one refernce. Dimensionally a bit large and gangly but likely would require mulitple volumes if in standard book size. The web page link is a nice feature given the fast moving topic. Cleanroom reference is out of date and could be updated given the reference focus. Text discusssions well written and unusually pleasant to read.
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